Exploration of quantum entanglement technologies for semiconductor inspection: practical applications and future directions
Yasunori Furukawa; Tetsuya Nishimura; Masafumi Asano; Masayoshi Arai; Yu Mukai; Ryo Okamoto; Shigeki Takeuchi
- Published
- Publisher
- SPIE
- Journal / collection
- Metrology, Inspection, and Process Control XL
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3090255
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Cite this source
Yasunori Furukawa; Tetsuya Nishimura; Masafumi Asano; Masayoshi Arai; Yu Mukai; Ryo Okamoto; Shigeki Takeuchi. Exploration of quantum entanglement technologies for semiconductor inspection: practical applications and future directions. Metrology, Inspection, and Process Control XL. 2026-04-08. https://doi.org/10.1117/12.3090255