Digital Twins for Semiconductor Manufacturing
Anna Ryabokon; Martin Graus; Konstantin Schekotihin; Abhi Rampal; Sabine Allmayer; Thomas Langreiter; Amin Anjomshoaa
- Published
- Publisher
- IEEE
- Journal / collection
- NOMS 2026-2026 IEEE Network Operations and Management Symposium
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/noms69089.2026.11668185
The original publisher provides the full text and its access options.
Cite this source
Anna Ryabokon; Martin Graus; Konstantin Schekotihin; Abhi Rampal; Sabine Allmayer; Thomas Langreiter; Amin Anjomshoaa. Digital Twins for Semiconductor Manufacturing. NOMS 2026-2026 IEEE Network Operations and Management Symposium. 2026-05. https://doi.org/10.1109/noms69089.2026.11668185