Device Structure Estimation by Inverse Calculation and Its Application to Semiconductor Manufacturing
Tomohiko Mori; Ryosuke Okachi; Junya Muramatsu; Makoto Kuwahara; Daigo Kikuta; Takaaki Aoki; Satoshi Kojima; Fumitaka Kato; Takafumi Arakawa
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 IEEE 38th International Symposium on Power Semiconductor Devices and ICs (ISPSD)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/ispsd64561.2026.11553686
The original publisher provides the full text and its access options.
Cite this source
Tomohiko Mori; Ryosuke Okachi; Junya Muramatsu; Makoto Kuwahara; Daigo Kikuta; Takaaki Aoki; Satoshi Kojima; Fumitaka Kato; Takafumi Arakawa. Device Structure Estimation by Inverse Calculation and Its Application to Semiconductor Manufacturing. 2026 IEEE 38th International Symposium on Power Semiconductor Devices and ICs (ISPSD). 2026-05-24. https://doi.org/10.1109/ispsd64561.2026.11553686