Robust Control of Rapid Thermal Processing System in Semiconductor Manufacturing
Osama Salmeh; Zeashan Hameed Khan
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 International Conference on Decision Aid Sciences and Applications (DASA)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/dasa68193.2025.11498728
The original publisher provides the full text and its access options.
Cite this source
Osama Salmeh; Zeashan Hameed Khan. Robust Control of Rapid Thermal Processing System in Semiconductor Manufacturing. 2025 International Conference on Decision Aid Sciences and Applications (DASA). 2025-12-01. https://doi.org/10.1109/dasa68193.2025.11498728