Automated Hyperspectral SIMS Nanoanalytics for Advanced Semiconductor Failure Analysis
Peter Gnauck; Alexander Ost; Torsten Richter
- Published
- Publisher
- Scientific Research and Community Ltd
- Journal / collection
- Journal of Biosensors and Bioelectronics Research
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.47363/jbber/2026(4)148
The original publisher provides the full text and its access options.
Cite this source
Peter Gnauck; Alexander Ost; Torsten Richter. Automated Hyperspectral SIMS Nanoanalytics for Advanced Semiconductor Failure Analysis. Journal of Biosensors and Bioelectronics Research. 2026-07-28. https://doi.org/10.47363/jbber/2026(4)148