A Next-Generation Defect Taxonomy for AI-Enhanced SEM-Based Semiconductor Inspection
Shajib Ghosh; Nitin Varshney; Antika Roy; Patrick Craig; Navid Asadizanjani
- Published
- Publisher
- Oxford University Press (OUP)
- Journal / collection
- Microscopy and Microanalysis
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1093/mam/ozaf048.1101
The original publisher provides the full text and its access options.
Cite this source
Shajib Ghosh; Nitin Varshney; Antika Roy; Patrick Craig; Navid Asadizanjani. A Next-Generation Defect Taxonomy for AI-Enhanced SEM-Based Semiconductor Inspection. Microscopy and Microanalysis. 2025-07. https://doi.org/10.1093/mam/ozaf048.1101