Wafer-data augmented unsupervised clustering for weak-pattern detection in advanced semiconductor manufacturing
Sangchul Yeo; Yongsun Jang; Dawoon Choi; Jaewon Yang; Kyoil Koo; Seongtae Jeong
- Published
- Publisher
- SPIE-Intl Soc Optical Eng
- Journal / collection
- Journal of Micro/Nanopatterning, Materials, and Metrology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1117/1.jmm.25.3.033202
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Cite this source
Sangchul Yeo; Yongsun Jang; Dawoon Choi; Jaewon Yang; Kyoil Koo; Seongtae Jeong. Wafer-data augmented unsupervised clustering for weak-pattern detection in advanced semiconductor manufacturing. Journal of Micro/Nanopatterning, Materials, and Metrology. 2026-08-08. https://doi.org/10.1117/1.jmm.25.3.033202