Physics-Informed Neural Networks for Semiconductor Film Deposition: A Review
Tao Han; Zahra Taheri; Hyunwoong Ko
- Published
- Publisher
- American Society of Mechanical Engineers
- Journal / collection
- Volume 2B: 45th Computers and Information in Engineering Conference (CIE)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1115/detc2025-169732
The original publisher provides the full text and its access options.
Cite this source
Tao Han; Zahra Taheri; Hyunwoong Ko. Physics-Informed Neural Networks for Semiconductor Film Deposition: A Review. Volume 2B: 45th Computers and Information in Engineering Conference (CIE). 2025-08-17. https://doi.org/10.1115/detc2025-169732