Equipment Fingerprint Recognition System of Machine Learning in Semiconductor Manufacturing
Yawei Chen; Shaohua Chang; Yaojun Ling; Eric Chien
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 IEEE International Conference on Computing (ICOCO)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/icoco67189.2025.11334164
The original publisher provides the full text and its access options.
Cite this source
Yawei Chen; Shaohua Chang; Yaojun Ling; Eric Chien. Equipment Fingerprint Recognition System of Machine Learning in Semiconductor Manufacturing. 2025 IEEE International Conference on Computing (ICOCO). 2025-10-06. https://doi.org/10.1109/icoco67189.2025.11334164