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An oxide thin-film transistor-based micro-newton force sensor with piezoelectric ZnO nanorods as back-channel strain-gate

Dantong Wang; Kaiyuan Lai; Ming Li; Yifan Li; Yurong Liu

Published
Publisher
Elsevier BV
Journal / collection
Journal of Alloys and Compounds
Research area
Semiconductors
Source type
Journal article
DOI
10.1016/j.jallcom.2025.183401

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Dantong Wang; Kaiyuan Lai; Ming Li; Yifan Li; Yurong Liu. An oxide thin-film transistor-based micro-newton force sensor with piezoelectric ZnO nanorods as back-channel strain-gate. Journal of Alloys and Compounds. 2025-09. https://doi.org/10.1016/j.jallcom.2025.183401

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