Inorganic acid and ammonia emission factors in semiconductor processes
Fu-Yun Chen; Ming-Peng Yeh; Sher Ling Lee; Tony Chen; Tzu-Sou Chuang; Hui-Hsin Tseng; Kuo-Lun Tung
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Science of The Total Environment
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.scitotenv.2025.180339
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Cite this source
Fu-Yun Chen; Ming-Peng Yeh; Sher Ling Lee; Tony Chen; Tzu-Sou Chuang; Hui-Hsin Tseng; Kuo-Lun Tung. Inorganic acid and ammonia emission factors in semiconductor processes. Science of The Total Environment. 2025-10. https://doi.org/10.1016/j.scitotenv.2025.180339