Ternary amorphous oxide semiconductor of In–Ga–O system for three-dimensional integrated device application
Takanori Takahashi; Mutsunori Uenuma; Masaharu Kobayashi; Yukiharu Uraoka
- Published
- Publisher
- AIP Publishing
- Journal / collection
- APL Materials
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/5.0243670
The original publisher provides the full text and its access options.
Cite this source
Takanori Takahashi; Mutsunori Uenuma; Masaharu Kobayashi; Yukiharu Uraoka. Ternary amorphous oxide semiconductor of In–Ga–O system for three-dimensional integrated device application. APL Materials. 2025-05-01. https://doi.org/10.1063/5.0243670