Data-Driven Inversion of Semiconductor Epitaxial Layer Parameters Adaptive Signal Processing and Robust M-Estimation
Letian Chen; Youbo Lian
- Published
- Publisher
- EDP Sciences
- Journal / collection
- ITM Web of Conferences
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1051/itmconf/20268903003
The original publisher provides the full text and its access options.
Cite this source
Letian Chen; Youbo Lian. Data-Driven Inversion of Semiconductor Epitaxial Layer Parameters Adaptive Signal Processing and Robust M-Estimation. ITM Web of Conferences. 2026. https://doi.org/10.1051/itmconf/20268903003