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Physics-Embedded AI-Based Spectroscopic Ellipsometry for Transparent Semiconductor Thin Films

Yuehua Hu; Pan Gyun Jeong; Chanwoo Yang; Minwoo Park; Jaekyun Kim; Kyung-Tae Kang

Published
Publisher
Elsevier BV
Research area
Semiconductors
Source type
Preprint / posted paper
DOI
10.2139/ssrn.7477243

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Yuehua Hu; Pan Gyun Jeong; Chanwoo Yang; Minwoo Park; Jaekyun Kim; Kyung-Tae Kang. Physics-Embedded AI-Based Spectroscopic Ellipsometry for Transparent Semiconductor Thin Films. Elsevier BV. 2026. https://doi.org/10.2139/ssrn.7477243

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