Machine learning-enhanced framework for hotspot detection and path-based analysis in advanced semiconductor nodes
Odie Ou; Shawn Hsu; Jung-Kuan Huang; Tien-Ai Ji; Hung-Yu Lin; Jason Sweis; Piyush Pathak; Jac Condella
- Published
- Publisher
- SPIE
- Journal / collection
- DTCO and Computational Patterning V
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1117/12.3090313
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Cite this source
Odie Ou; Shawn Hsu; Jung-Kuan Huang; Tien-Ai Ji; Hung-Yu Lin; Jason Sweis; Piyush Pathak; Jac Condella. Machine learning-enhanced framework for hotspot detection and path-based analysis in advanced semiconductor nodes. DTCO and Computational Patterning V. 2026-04-10. https://doi.org/10.1117/12.3090313