Design of Reinforcement Learning-Based Dual-Servo Controller for Semiconductor Inspection Equipment
Seung Woo Seo; Yongho Jeon; Moon Gu Lee
- Published
- Publisher
- The Korean Society of Manufacturing Technology Engineers
- Journal / collection
- Journal of the Korean Society of Manufacturing Technology Engineers
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.7735/ksmte.2026.35.1.23
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Cite this source
Seung Woo Seo; Yongho Jeon; Moon Gu Lee. Design of Reinforcement Learning-Based Dual-Servo Controller for Semiconductor Inspection Equipment. Journal of the Korean Society of Manufacturing Technology Engineers. 2026-02-15. https://doi.org/10.7735/ksmte.2026.35.1.23