A data-driven framework for energy-efficient design optimization of semiconductor cleanroom HVAC systems
Sang Min Lee; Jihoon Kim; Dong Wook Lee; Jihoo Moon; Gu Hwang Kang; Daegyoum Kim; Bong Jae Lee; Joon Sang Kang
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Case Studies in Thermal Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.csite.2026.108351
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Cite this source
Sang Min Lee; Jihoon Kim; Dong Wook Lee; Jihoo Moon; Gu Hwang Kang; Daegyoum Kim; Bong Jae Lee; Joon Sang Kang. A data-driven framework for energy-efficient design optimization of semiconductor cleanroom HVAC systems. Case Studies in Thermal Engineering. 2026-09. https://doi.org/10.1016/j.csite.2026.108351