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Research literature / Conference paper

XRFab: Immersive Cleanroom Training with Digital Twins and XR for Semiconductor Manufacturing

Mayank Chadha; Guodong Chen; Barath Balamurugan; Zhewen Yang; Alok Mishra; Mallesham Dasari

Published
Publisher
IEEE
Journal / collection
2025 IEEE International Symposium on Emerging Metaverse (ISEMV)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/isemv67326.2025.00020

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Mayank Chadha; Guodong Chen; Barath Balamurugan; Zhewen Yang; Alok Mishra; Mallesham Dasari. XRFab: Immersive Cleanroom Training with Digital Twins and XR for Semiconductor Manufacturing. 2025 IEEE International Symposium on Emerging Metaverse (ISEMV). 2025-10-19. https://doi.org/10.1109/isemv67326.2025.00020

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