Anomaly Detection Based on Graph Attention Networks in Semiconductor Manufacturing Processes
Qingrui Guo; Shuangwu Chen; Dong Jin; Yao Chen
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 6th International Conference on Artificial Intelligence and Electromechanical Automation (AIEA)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/aiea66061.2025.11160592
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Cite this source
Qingrui Guo; Shuangwu Chen; Dong Jin; Yao Chen. Anomaly Detection Based on Graph Attention Networks in Semiconductor Manufacturing Processes. 2025 6th International Conference on Artificial Intelligence and Electromechanical Automation (AIEA). 2025-08-01. https://doi.org/10.1109/aiea66061.2025.11160592