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Research literature / Conference paper

Data-Driven Assessment of Health Status for Semiconductor Equipment

Kai Zhang; Huijie Mao

Published
Publisher
IEEE
Journal / collection
2026 Conference of Science and technology of Integrated Circuits (CSTIC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/cstic68613.2026.11537713

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Kai Zhang; Huijie Mao. Data-Driven Assessment of Health Status for Semiconductor Equipment. 2026 Conference of Science and technology of Integrated Circuits (CSTIC). 2026-03-22. https://doi.org/10.1109/cstic68613.2026.11537713

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