Improving Semiconductor Defect Classification in SEM Images via Domain Adaptation
Dongyoon Yang; Jimoon Jeong; Hyunsoo Yoon
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Open Journal of the Industrial Electronics Society
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/ojies.2026.3663382
The original publisher provides the full text and its access options.
Cite this source
Dongyoon Yang; Jimoon Jeong; Hyunsoo Yoon. Improving Semiconductor Defect Classification in SEM Images via Domain Adaptation. IEEE Open Journal of the Industrial Electronics Society. 2026. https://doi.org/10.1109/ojies.2026.3663382