Effect of atomic-layer-deposition sequence on the composition of indium-zinc-tin oxide thin films and its effect on thin-film transistor characteristics
Yurim Jeong; Chang-Yun Na; Sung Min Cho
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Thin Solid Films
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.tsf.2025.140714
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Cite this source
Yurim Jeong; Chang-Yun Na; Sung Min Cho. Effect of atomic-layer-deposition sequence on the composition of indium-zinc-tin oxide thin films and its effect on thin-film transistor characteristics. Thin Solid Films. 2025-09. https://doi.org/10.1016/j.tsf.2025.140714