Accelerating XPS Metrology with AI to Enhance Throughput in High-Volume Semiconductor Manufacturing
Parikshit Jain; Dmitry Kislitsyn; Heath Pois; Paul Isbester; Mark Klare; Mitch Shiver; Prakhar Soni; Wei Ti Lee; Ravi Dey; Aarthi Sundaram; Ganesh Subramanian; Mark Duggan
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/asmc69324.2026.11551272
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Cite this source
Parikshit Jain; Dmitry Kislitsyn; Heath Pois; Paul Isbester; Mark Klare; Mitch Shiver; Prakhar Soni; Wei Ti Lee; Ravi Dey; Aarthi Sundaram; Ganesh Subramanian; Mark Duggan. Accelerating XPS Metrology with AI to Enhance Throughput in High-Volume Semiconductor Manufacturing. 2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2026-05-11. https://doi.org/10.1109/asmc69324.2026.11551272