Design of a long working distance, large aperture microscope objective for semiconductor precision inspection
Zhenyu Chen; Zhengyu Lin; Jiyan Zhang; Muwang Huang; Tianhao Cao; Yangyu Shen; Chenyang Shuai
- Published
- Publisher
- Optica Publishing Group
- Journal / collection
- Applied Optics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1364/ao.584862
The original publisher provides the full text and its access options.
Cite this source
Zhenyu Chen; Zhengyu Lin; Jiyan Zhang; Muwang Huang; Tianhao Cao; Yangyu Shen; Chenyang Shuai. Design of a long working distance, large aperture microscope objective for semiconductor precision inspection. Applied Optics. 2026-03-26. https://doi.org/10.1364/ao.584862