SiliconBASE: multi-task baseline model for semiconductor metrology and inspection applications
Yonghyun Kim; Jihyung Ko; Sally Shin; Sang-Gil Park; Il Koo Kim
- Published
- Publisher
- SPIE
- Journal / collection
- Metrology, Inspection, and Process Control XXXIX
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3050285
The original publisher provides the full text and its access options.
Cite this source
Yonghyun Kim; Jihyung Ko; Sally Shin; Sang-Gil Park; Il Koo Kim. SiliconBASE: multi-task baseline model for semiconductor metrology and inspection applications. Metrology, Inspection, and Process Control XXXIX. 2025-04-24. https://doi.org/10.1117/12.3050285