Airborne emissions and corrosion of stainless bellows under simulated semiconductor halide environment
Donghyeon Kim; Jongcheol Lee; Minjung Kim
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Hazardous Materials
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jhazmat.2025.140484
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Cite this source
Donghyeon Kim; Jongcheol Lee; Minjung Kim. Airborne emissions and corrosion of stainless bellows under simulated semiconductor halide environment. Journal of Hazardous Materials. 2025-12. https://doi.org/10.1016/j.jhazmat.2025.140484