nanoPMC: A GPU-Accelerated Particle Monte Carlo Simulator for Feature-Scale Semiconductor Process Modeling
Om Maheshwari; Pardeep Kumar; Samit Barai; Nihar Ranjan Mohapatra
- Published
- Publisher
- American Society of Mechanical Engineers
- Journal / collection
- Volume 3: Advances in Thermal Technologies; Advances in Semiconductor Manufacturing; Clean Energy Technologies & Systems; Cyber Physical Systems + AI / ML
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1115/imece-india2025-160835
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Cite this source
Om Maheshwari; Pardeep Kumar; Samit Barai; Nihar Ranjan Mohapatra. nanoPMC: A GPU-Accelerated Particle Monte Carlo Simulator for Feature-Scale Semiconductor Process Modeling. Volume 3: Advances in Thermal Technologies; Advances in Semiconductor Manufacturing; Clean Energy Technologies & Systems; Cyber Physical Systems + AI / ML. 2025-09-10. https://doi.org/10.1115/imece-india2025-160835