Quartz resonator-based atomic force microscopy as a stable semiconductor metrology solution
Hankyul Koh; Jonghwan Seo; Jiwon Yun; Hanseong Kang; Heewon Lee; Sangbin Do; Hoeyoung Choe; Joon-hyuk Ko; Wonho Jhe
- Published
- Publisher
- SPIE
- Journal / collection
- Metrology, Inspection, and Process Control XL
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3098141
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Cite this source
Hankyul Koh; Jonghwan Seo; Jiwon Yun; Hanseong Kang; Heewon Lee; Sangbin Do; Hoeyoung Choe; Joon-hyuk Ko; Wonho Jhe. Quartz resonator-based atomic force microscopy as a stable semiconductor metrology solution. Metrology, Inspection, and Process Control XL. 2026-04-08. https://doi.org/10.1117/12.3098141