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EPreNet: A Physics-Modulated Spatio-temporal Network for Fast Semiconductor Etch Profile Prediction

Mengjiao Lu; Zeri Jin; Wanjun Wang; Mingyong Pang

Published
Publisher
Elsevier BV
Research area
Semiconductors
Source type
Preprint / posted paper
DOI
10.2139/ssrn.6072484

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Mengjiao Lu; Zeri Jin; Wanjun Wang; Mingyong Pang. EPreNet: A Physics-Modulated Spatio-temporal Network for Fast Semiconductor Etch Profile Prediction. Elsevier BV. 2026. https://doi.org/10.2139/ssrn.6072484

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