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Research literature / Conference paper

Rapid Probe Microscope (RPM) Technology Advances High-Speed AFM Systems for Next-Generation Semiconductor Metrology

Lei Feng; Vishal Panchal; Richard Thorogate; James Robinson; Andrew Humphris

Published
Publisher
IEEE
Journal / collection
2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/asmc64512.2025.11010280

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Lei Feng; Vishal Panchal; Richard Thorogate; James Robinson; Andrew Humphris. Rapid Probe Microscope (RPM) Technology Advances High-Speed AFM Systems for Next-Generation Semiconductor Metrology. 2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2025-05-05. https://doi.org/10.1109/asmc64512.2025.11010280

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