Image resolution enhancement method of scanning acoustic microscope for semiconductor inspection
Hao Liang; Jian Xue; Ke Lu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- NDT & E International
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.ndteint.2025.103328
The original publisher provides the full text and its access options.
Cite this source
Hao Liang; Jian Xue; Ke Lu. Image resolution enhancement method of scanning acoustic microscope for semiconductor inspection. NDT & E International. 2025-09. https://doi.org/10.1016/j.ndteint.2025.103328