Deep transfer operator learning for predicting low temperature plasma sheath dynamics in semiconductor processing
Sangjun Ahn; Jinkyu Bae; Suyoung Yoo; Sang Ki Nam
- Published
- Publisher
- AIP Publishing
- Journal / collection
- Physics of Plasmas
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/5.0275149
The original publisher provides the full text and its access options.
Cite this source
Sangjun Ahn; Jinkyu Bae; Suyoung Yoo; Sang Ki Nam. Deep transfer operator learning for predicting low temperature plasma sheath dynamics in semiconductor processing. Physics of Plasmas. 2025-09-01. https://doi.org/10.1063/5.0275149