PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps
Jae-Yung Song; Seung-min Oh
- Published
- Publisher
- Korean Society of Computer Information
- Journal / collection
- Journal of the Korea Society of Computer and Information
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.9708/jksci.2026.31.06.169
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Cite this source
Jae-Yung Song; Seung-min Oh. PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps. Journal of the Korea Society of Computer and Information. 2026-06-30. https://doi.org/10.9708/jksci.2026.31.06.169