GenAI applications of vision-language models for semiconductor defect classification
Ting-Hung (Tim) Lin; Hung-Jen Chen; Yuan-Chung Wei; Sung-Po Yang; Yung-Lun Lin; Parthasarathy Sriram; Guan-Hong Liou; Yu-Chieh Huang; Yi-Hsuan Chiu; Po-Chun Lai; Yiyi Wang; Mark Peng
- Published
- Publisher
- SPIE
- Journal / collection
- Metrology, Inspection, and Process Control XXXIX
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3064772
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Cite this source
Ting-Hung (Tim) Lin; Hung-Jen Chen; Yuan-Chung Wei; Sung-Po Yang; Yung-Lun Lin; Parthasarathy Sriram; Guan-Hong Liou; Yu-Chieh Huang; Yi-Hsuan Chiu; Po-Chun Lai; Yiyi Wang; Mark Peng. GenAI applications of vision-language models for semiconductor defect classification. Metrology, Inspection, and Process Control XXXIX. 2025-04-26. https://doi.org/10.1117/12.3064772