An Electrical Variable Capacitor Circuit for Fast Semiconductor Process
Hongmin Kim; Heewon Choi; Cheonghyeon Hwang; Yongsug Suh; Cheon-Yong Lim
- Published
- Publisher
- The Korean Institute of Power Electronics
- Journal / collection
- The Transactions of the Korean Institute of Power Electronics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.6113/tkpe.2026.31.3.273
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Cite this source
Hongmin Kim; Heewon Choi; Cheonghyeon Hwang; Yongsug Suh; Cheon-Yong Lim. An Electrical Variable Capacitor Circuit for Fast Semiconductor Process. The Transactions of the Korean Institute of Power Electronics. 2026-06-30. https://doi.org/10.6113/tkpe.2026.31.3.273