Review of wafer defect detection in semiconductor manufacturing: Algorithms, systems, and data
Jian Li; Xiangyan Zhang; Xuexiu Liang; Gefan Yin; Lutao Yan; Shimin Wei
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Journal of Intelligent Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s10845-026-02845-z
The original publisher provides the full text and its access options.
Cite this source
Jian Li; Xiangyan Zhang; Xuexiu Liang; Gefan Yin; Lutao Yan; Shimin Wei. Review of wafer defect detection in semiconductor manufacturing: Algorithms, systems, and data. Journal of Intelligent Manufacturing. 2026-04-21. https://doi.org/10.1007/s10845-026-02845-z