Fast and High-Precision Temperature Control in Semiconductor Vertical Furnace via Iterative Experiments
Christian Milleneuve Budiono; Akira Hirata; Tatsuya Yamaguchi; Takafumi Koseki; Wataru Ohnishi
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2025.3576496
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Cite this source
Christian Milleneuve Budiono; Akira Hirata; Tatsuya Yamaguchi; Takafumi Koseki; Wataru Ohnishi. Fast and High-Precision Temperature Control in Semiconductor Vertical Furnace via Iterative Experiments. IEEE Transactions on Semiconductor Manufacturing. 2025-08. https://doi.org/10.1109/tsm.2025.3576496