Dispersion of particles and airflow optimization for a semiconductor cleanroom
Chunli Tang; Tianchi Liang; Kambiz Vafai
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Aerosol Science
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jaerosci.2025.106570
The original publisher provides the full text and its access options.
Cite this source
Chunli Tang; Tianchi Liang; Kambiz Vafai. Dispersion of particles and airflow optimization for a semiconductor cleanroom. Journal of Aerosol Science. 2025-05. https://doi.org/10.1016/j.jaerosci.2025.106570