Benchmarking Soft Sensors for Semiconductor Manufacturing: Random Forest vs. Semi-Supervised Gaussian Process Regression
Kariman Elsayed; Raafat Shalaby
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 7th Novel Intelligent and Leading Emerging Sciences Conference (NILES)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/niles68063.2025.11231979
The original publisher provides the full text and its access options.
Cite this source
Kariman Elsayed; Raafat Shalaby. Benchmarking Soft Sensors for Semiconductor Manufacturing: Random Forest vs. Semi-Supervised Gaussian Process Regression. 2025 7th Novel Intelligent and Leading Emerging Sciences Conference (NILES). 2025-10-25. https://doi.org/10.1109/niles68063.2025.11231979