P‐246: Late‐News & Invited Poster: Optimizing the Crystal Growth of Ultrathin In‐Sn‐O Thin‐Film‐Transistor via Plasma‐Enhanced ALD
Soojin Park; Gwang-Bok Kim; Jae Kyeong Jeong
- Published
- Publisher
- Wiley
- Journal / collection
- SID Symposium Digest of Technical Papers
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1002/sdtp.70001_476
The original publisher provides the full text and its access options.
Cite this source
Soojin Park; Gwang-Bok Kim; Jae Kyeong Jeong. P‐246: Late‐News & Invited Poster: Optimizing the Crystal Growth of Ultrathin In‐Sn‐O Thin‐Film‐Transistor via Plasma‐Enhanced ALD. SID Symposium Digest of Technical Papers. 2026-06. https://doi.org/10.1002/sdtp.70001_476