Digital lithography technology for advanced packaging manufacturing
Anindarupa Chunder; Cindy Mora; Heather Bailey; Bruce Lee; Clay Yeh; C.C. Chuang; Qin Zhong; Niranjan Khasgiwale; Jang Fung Chen
- Published
- Publisher
- SPIE
- Journal / collection
- Novel Patterning Technologies 2025
- Research area
- Industrial systems
- Source type
- Conference paper
- DOI
- 10.1117/12.3049294
The original publisher provides the full text and its access options.
Cite this source
Anindarupa Chunder; Cindy Mora; Heather Bailey; Bruce Lee; Clay Yeh; C.C. Chuang; Qin Zhong; Niranjan Khasgiwale; Jang Fung Chen. Digital lithography technology for advanced packaging manufacturing. Novel Patterning Technologies 2025. 2025-05-06. https://doi.org/10.1117/12.3049294