Machine Learning‐Driven Variability Analysis of Process Parameters for Semiconductor Manufacturing
Sinyeong Kang; Hyeok Yun; Kyeongrae Cho; Seungjoon Eom; Soomin Kim; Seongsoo Jeong; Rockhyun Baek
- Published
- Publisher
- Wiley
- Journal / collection
- Advanced Intelligent Systems
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1002/aisy.202501049
The original publisher provides the full text and its access options.
Cite this source
Sinyeong Kang; Hyeok Yun; Kyeongrae Cho; Seungjoon Eom; Soomin Kim; Seongsoo Jeong; Rockhyun Baek. Machine Learning‐Driven Variability Analysis of Process Parameters for Semiconductor Manufacturing. Advanced Intelligent Systems. 2026-03-06. https://doi.org/10.1002/aisy.202501049