How lithography lost the leadership position in semiconductor technology
Paolo A. Gargini
- Published
- Publisher
- SPIE
- Journal / collection
- International Conference on Extreme Ultraviolet Lithography 2025
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3069624
The original publisher provides the full text and its access options.
Cite this source
Paolo A. Gargini. How lithography lost the leadership position in semiconductor technology. International Conference on Extreme Ultraviolet Lithography 2025. 2025-11-06. https://doi.org/10.1117/12.3069624