AI-powered semiconductor wafer fabrication: A manufacturing paradigm shift
Guanwei He; Qingqing Huang; Xinhao Li; Libo Zhou; Miao Yang; Yadan Luo; Marian Wiercigroch; Han Huang
- Published
- Publisher
- Elsevier BV
- Journal / collection
- International Journal of Machine Tools and Manufacture
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.ijmachtools.2025.104345
The original publisher provides the full text and its access options.
Cite this source
Guanwei He; Qingqing Huang; Xinhao Li; Libo Zhou; Miao Yang; Yadan Luo; Marian Wiercigroch; Han Huang. AI-powered semiconductor wafer fabrication: A manufacturing paradigm shift. International Journal of Machine Tools and Manufacture. 2026-01. https://doi.org/10.1016/j.ijmachtools.2025.104345