Adaptive Inversion Study of Semiconductor Epitaxial Layer Thickness Based on Airy Multi-Beam Interference Theory
Jingjie Zhou
- Published
- Publisher
- SCITEPRESS - Science and Technology Publications
- Journal / collection
- Proceedings of the 1st International Conference on Smart System Design, Application and Mechatronics
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.5220/0015174600005244
The original publisher provides the full text and its access options.
Cite this source
Jingjie Zhou. Adaptive Inversion Study of Semiconductor Epitaxial Layer Thickness Based on Airy Multi-Beam Interference Theory. Proceedings of the 1st International Conference on Smart System Design, Application and Mechatronics. 2026. https://doi.org/10.5220/0015174600005244