A novel approach for the planarization of advanced semiconductor devices
Douglas J. Resnick
- Published
- Publisher
- SPIE
- Journal / collection
- Novel Patterning Technologies 2026
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3091606
The original publisher provides the full text and its access options.
Cite this source
Douglas J. Resnick. A novel approach for the planarization of advanced semiconductor devices. Novel Patterning Technologies 2026. 2026-04-09. https://doi.org/10.1117/12.3091606