A reinforcement learning framework for energy-aware semiconductor manufacturing operations
Chih-Chiang Fang
- Published
- Publisher
- SPIE
- Journal / collection
- International Symposium on New Energy and Green Manufacturing (NEGM 2026)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3124245
The original publisher provides the full text and its access options.
Cite this source
Chih-Chiang Fang. A reinforcement learning framework for energy-aware semiconductor manufacturing operations. International Symposium on New Energy and Green Manufacturing (NEGM 2026). 2026-09-22. https://doi.org/10.1117/12.3124245