A decision support system for semiconductor manufacturing based on hierarchical optimization
Hua Pang; Ming Fang; Murong Jin; Junyu Lyu; Kangkang Cai
- Published
- Publisher
- Institution of Engineering and Technology (IET)
- Journal / collection
- IET Conference Proceedings
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1049/icp.2025.4430
The original publisher provides the full text and its access options.
Cite this source
Hua Pang; Ming Fang; Murong Jin; Junyu Lyu; Kangkang Cai. A decision support system for semiconductor manufacturing based on hierarchical optimization. IET Conference Proceedings. 2026-01. https://doi.org/10.1049/icp.2025.4430