Open-Set Semiconductor Defect Classification in SEM Images via Uncertainty-Aware Local Prototype Alignment
Sisi Chen; Xinyi Yuan; Boran Hu; Yikang Zhou; Aohan Mei; Nan Li
- Published
- Publisher
- Scilight Press Pty Ltd
- Journal / collection
- AI Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.53941/aieng.2026.100012
The original publisher provides the full text and its access options.
Cite this source
Sisi Chen; Xinyi Yuan; Boran Hu; Yikang Zhou; Aohan Mei; Nan Li. Open-Set Semiconductor Defect Classification in SEM Images via Uncertainty-Aware Local Prototype Alignment. AI Engineering. 2026-08-06. https://doi.org/10.53941/aieng.2026.100012