Optimizing semiconductor process recipe settings using hybrid meta-learning and metaheuristic approaches
Zhen-Yin Annie Chen; Chun-Cheng Lin; Ke-Wen Lu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Information Sciences
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.ins.2025.121998
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Cite this source
Zhen-Yin Annie Chen; Chun-Cheng Lin; Ke-Wen Lu. Optimizing semiconductor process recipe settings using hybrid meta-learning and metaheuristic approaches. Information Sciences. 2025-07. https://doi.org/10.1016/j.ins.2025.121998